Medium and Large Dry Pumps and Systems

iXL Dry Pumps

iXL120 is a compact, low energy, 110 m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption.

iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment.

GXS Dry Pumps

Edwards, the pioneer in dry pumping technology, launches a new generation of dry vacuum pumps for industrial applications.


With more than 90 years vacuum experience and over 150,000 dry pumps installed world wide, Edwards leads the way in every vacuum application including those handling harsh dust and process contaminants.


Edwards GXS range incorporates our unique screw technology with a world leading high efficiency drive to achieve excellent vacuum performance and low running costs.  With advanced temperature control, low maintenance and long service intervals, the GXS is the most robust and economical vacuum pump that establishes a new standard in dry pumping.


Drystar 80 Pumps

Edwards Drystar 80 dry vacuum pump is configured for ease of installation and commissioning while providing a clean, robust and cost effective alternative to traditional oil-sealed pumps.

The Drystar 80 is designed to handle large volumes of condensable vapours and particulate loads to provide a consistent pumping performance, minimal service intervention and low cost of ownership.  The use of dry pumping technology and unique seal design will eliminate contamination throughout the vacuum process making the Drystar 80 suitable for a range of applications and environments.

IDX Dry pumps

The Edwards IDX dry pumps use the latest screw technology to provide a clean, effluent free vacuum. These pumps offer the ability to handle large volumes of dust and water vapor without any loss of performance while minimizing maintenance requirements and running costs. The IDX dry pumps are capable of continually operating from atmosphere to ultimate.

iGX Dry Pumps

The Edwards iGX Dry Pumps provide a versatile vacuum pump platform with reliable performance for clean to medium-duty silicon and compound semiconductor applications. Compact size and low vibration allow great flexibility as iGX pumps can be used for on-tool, proximity or remote installations - in turn, ensuring space savings and ultimately reduced overall cost of ownership. The iGX pumps also offer Ethernet connectivity and other networking options.

GX Dry Pumps

The Edwards GX Dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. GX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.

iH Dry Pumps

The Edwards iH dry pumps offer a highly reliable, low cost pump for difficult processes where particulate, condensable or corrosive by-products are present. The iH series has a five stage base pump with an innovative cantilever rotor, claw and roots design which improves dust handling and reduces exhaust noise. In addition, iH series pumps are fitted with a single stage mechanical booster pump and totally enclosed water cooled motors.

EPX on-tool High Vacuum Pumps

The Edwards EPX high vacuum dry pumps offer on-tool pumping in a lighter and smaller package, requiring only 1.4 kW of power. Using a unique, patented, single-shaft regenerative/Holweck� stage mechanism, EPX series pumps are capable of pumping from atmosphere to ultimate pressures with no risk of process contamination.