Obsolete Legacy Products

EXT Turbomolecular Pumps

Our range of EXT compound turbo molecular pumps and TIC Controllers use state-of-the-art technology to provide reliable, high and ultra high vacuum.

XDS 5/10 Scroll Pumps

Scroll pumps are an excellent alternative to rotary vane pumps where oil free pumping is desirable. The XDS pumps, with pumping speeds of 5, 10 and 35 m3/hr, in particular use an innovative bearing shield to isolate the vacuum environment from all forms of lubricant not only making them totally dry, but also protecting the bearing from any process gases. Vapour handling is enabled by an adjustable gas ballast; this allows the range of pumps to satisfy many applications that were previously off limits to other scroll pumps.

ES Single Stage Oil Sealed Rotary Vane Pumps

The Edwards ES range of pumps represents the advanced single stage oil sealed rotary vane pumps. The pump mechanism has been refined to produce a better quality of vacuum. The vacuum performance is highly stable, without any of the pressure fluctuations that are often seen in single stage pumps thanks to the optimised oil return system, improving product quality and giving consistent process results. Extended service intervals and easy in house maintenance make the ES range a flexible vacuum solution for a wide range of industrial applications. They can be used individually or with mechanical booster pumps to increase both performance and ultimate vacuum.

STP Turbomolecular Pumps

The STP magnetically levitated turbomolecular pumps are the first choice for high-up time, hydrocarbon free pumping. The multi-axis magnetic bearing system is used to suspend the rotor during operation, ensuring there is no risk of contamination while minimizing vibration, noise and maintenance requirements. The STP pumps can be fully interfaced with advanced controllers to operate on a wide range of applications and processes.

EV Single Stage Oil Sealed Rotary Vane Pumps

The EV range of vacuum pumps utilize a combination of proven low-maintenance rotary vane technology and environmentally –aware design to provide an economical solution for industrial and scientific applications. Suitable for use where high ultimate vacuums are not required, the EV range of pumps allows continuous operation from atmosphere to ultimate vacuum. These pumps can be used individually or with mechanical booster pumps to increase both performance and ultimate vacuum.


Our newly designed family of coaters offer solutions to processing requirements that range from small scale R&D or preproduction applications to large scale, high volume production fabrication lines. Ideal for either lift off or step coverage processes, these cleanroom compatible systems accept a multitude of accessories to meet almost any requirement.
In addition, our coaters are designed to optimize flexibility and efficiency in installation as well as operation. Fully automated processing via the Temescal control system maximizes throughput as well as ease of use. The PLC Based TCS provides fully integrated process and vacuum control, recipe driven pump to vent processing with datalogging, and automated pump, vent, and regeneration cycles that run independently of recipe processing.

Spares and Accessories

Spares and accessories listed here will still be available when the pump is obsolete.

E-Beam Guns

Temescal offers a wide range of guns, for various process applications. Single pocket, multi-pocket turret guns, PopTop turret guns plus accessories like crucible liners, wire feeders, and feedthrough kits.

Electron Beam Gun Accessories

These accessories are to be used with Temescal Electron Beam Guns.

GV Dry Pumps

Edwards have pioneered the use of dry vacuum pumps in some of the most harsh applications. With over 10 years experience and more than 60,000 Drystar pumps installed world-wide, this technology now becomes available to the industrial user.
Our GV Drystar pumps are a new series of dry vacuum pumps designed to perform reliably and economically in a range of demanding industrial applications. The GV pumps have displacements from 91.5 m3h-1 to 793 m3h-1.

EO50/60 Air Cooled Diffusion Pump

The model EO50/60 is a compact, fast warm-up air-cooled diffusion pump supplied complete with high integrity inlet Co-Seal, flange clamping ring and optional baffle. The jet assembly is removable for easy cleaning. It meets the need for a low-cost, high vacuum pump for use in desk top or mobile scientific instruments, leak detectors, and general laboratory applications.

ATC Active Thermocouple Gauge

The Edwards Active Thermocouple (ATC-E) gauges mount directly on the thermocouple tube to form a compact, stand-alone transducer. The ATC-E electronics module drives both medium and low pressure gauge tubes providing a package that offers a cost effective measuring solution for higher pressures.

Model 1575 Pressure Display

The Model 1575 Pressure Display is a low cost, microprocessor based, digital display and set-point controller for the Barocel 600, 622 and 655 capacitance manometers. The Model 1575 incorporates power supply, digital display, four user-selectable set-points, along with analog and optional RS232 outputs in a compact 1/8 DIN package.

E-Beam Power Supplies and Sweep

Temescal offer 6, 12 and 15 kW e-beam power supplies with super fast arc recovery.

Deposition Controllers

Temescal offer a variety of Desposition Controllers for closed loop control over one or more single or multipocket e-beam guns. Temescal Desposition Controllers are available in a number of configurations to suit specific applications.

System Accessories

Temescal System Accessories have been designed to support all Temescal Desposition Systems. System Accessories range from crucible liners to substrate heaters.

Domes and Planets

Temescal offer various Domes and Planets for use with all Temescal Desposition Systems including Lift-off, conformal coverage, variable angle and flip tolling.

pHMB Mechanical Boosters

The Edwards pHMB Proximity Booster Pumps are water-cooled, positive displacement roots pumps designed specifically for load lock applications in the semiconductor industry. These pumps are driven by an inverter and are controlled by a suitable backing pump.

Leak Detectors

Edwards has ceased the manufacture and global supply of its Spectron 300E, Spectron 5000 and QLD ranges of leak detectors effective at the end of October 2004. The Spectron 600 range has been discontinued as of January 2007.

Continued Service and Support

We are dedicated to continued service and support for our customers. If you currently own a Edwards Spectron leak detector, spares and service will continue to be provided for the Spectron 300E, Spectron 600 series, Spectron 5000 series and QLD leak detectors. Please contact your local Edwards facility for more information about service support.

High Throughput Diffusion Pumps

The Edwards HT and EO diffusion pumps offer the highest throughput (pressure multiplied by pumping speed) of any comparable sized pump, making them ideal for industrial processes that involve large quantities of gases. These diffusion pumps can be used on processes with high critical backing pressure and feature baffles to ensure backstreaming is minimized.

SN Booster Pumps

The Edwards SN booster pumps provide high throughput pumps for industrial and arduous chemical applications. Utilizing reliable, rugged designs, these pumps offer a low cost, space saving pumping systems.