Inward Fired Combustors

Atlas™ from Edwards: the range of combustion gas abatement solutions that offers semiconductor manufacturers reduced operating costs and enhanced ease-of-use.


Atlas™ systems have low fuel consumption compared with previous-generation gas abatement devices and utilize proven Alzeta™ inward-fired combustor technology to achieve significantly reduced costs of ownership. With one to six inlets with a number of options, including a temperature management system (TMS), they can reach a flow capacity of up to 600 slm and they offer enhanced ease-of-use and more efficient maintenance.

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Atlas TCS

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Atlas TPU

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Atlas Kronis

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Atlas Helios

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Atlas Etch