iXL Dry Pumps

iXL120 is a compact, low energy, 110 m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption.

iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment.