d05002302 - WRA300S

WRA300S

D05002302

Overview

All RGAs are equipped with dedicated, easy-to-use software which allows you to track your process in real time from your laptop and do detailed analysis of up to 16 different units. For those wanting a snapshot view, the units have a unique on-board display which can show you the main gas types as well as the overall pressure of your system without having to connect via laptop.

Applications

Analytical Instruments

·        Electron microscopy

·        Leak detection

·        Mass spectrometry

·        Surface analysis

Research and development

·        Space simulation

·        Research institutes

·        Governmental Labs

·        Accelerators

Semiconductor

·        Metrology

·        Lithography

·        PVD (physical vapour deposition)

·        CVD (chemical vapour deposition)

·        Flat panel display

Industrial

·        Industrial leak detection

·        Electron beam welding

·        Freeze drying

·        Process monitoring

·        Glass coating

·        Vacuum furnaces

High energy physics

·        Beam lines

·        Accelerators

·        Fusion

·        Laser evacuation


d05002202 - WRA200S

WRA200S

D05002202
d05002302 - WRA300S

WRA300S

D05002302

Features and Benefits

·        Higher Sensitivity as standard

·        Wide measuring range (up to 300amu)

·        Low cost of ownership

·        High Bakeout temperature of 300C

·        Intuitive software included

·        On – board display

Technical Data

 

WRA200S

WRA300S

Mass range (amu)

1-200

1-300

Mass filter type

QMS

QMS

Dectector type

EM/Faraday Cup

EM/Faraday Cup

Sensitivity (A/mbar)

400/2.5x10-4

400/2.5x10-4

Minimum Detectable partial pressure (mbar)

1x10-12/1x10-11

1x10-12/1x10-11

Max operating pressure (mbar)

1x10-4

1x10-4

Fialment Material

Ir/Y2O3

Ir/Y2O3

Operating temp ( C)

40

40

Max analyser temp ( C)

250

250

Max bake out temp (Elec removed ( C)

300

300

Connection Flange

DN40CF

DN40CF

Power input

DC24V +-10% 50W

DC24V +-10% 50W

Weight

3.21

3.21

IP

30

30

Serial Communication

RS232C/RS485

RS232C/RS485

Resolution

M/DeltaM=1M(10%PH)

M/DeltaM=1M(10%PH)