d04861000 - AIGX-D-DN16CF

AIGX-D-DN16CF

D04861000

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Overview

A compact Active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 6.6 x 10-2 to 6.6 x 10-10 mbar (5 x 10-2 to 5 x 10-10 Torr) and a 1 Volt/decade linear output.
The new AIGX gauge from Edwards incorporates all the benefits of the industry standard Active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments.
The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.

Technology

The AIGX is an ion gauge head and gauge controller in a single compact unit. The gauge operates as a hot filament ionisation gauge, in which the pressure is measured indirectly as a function of the current. The AIGX requires a 14.5 - 30 V d.c. power supply; it has a 0 to 10 V d.c.analogue output which is related to pressure. The AIGX is compatible with the Edwards TIC controllers. Alternatively, you can use an independent power supply and you can read the output signal with a voltmeter or analogue to digital converter. The AIGX is supplied with two filaments. A switch on top of the gauge selects between filament 1 and 2. There are two levels of emission currents: 0.1 and 1 mA. The gauge will automatically select 1 mA emission current at low pressure, and 0.1 mA at high pressure. A protection circuit is built into the gauge to prevent operating the gauge at pressures higher than 5 x 10-2 torr.

 

The AIGX can be degassed using the degas feature. During degas, the grid voltage is 500 V and the emission current is 10 mA. The degas is inhibited at high pressure. The maximum duration of degas is three minutes, after which the gauge returns automatically to its normal mode.

The AIGX has a set-point facility. The set-point signal is an open collector transistor output, which is on when the pressure measured by the gauge is below a preset pressure. The pressure at which the set-point operates can be adjusted using the set-trip switch on the top of the gauge (Figure 1,item 3).

The AIGX is fitted with a status LED (Figure 1, item 4) . This LED indicates the operating status of the gauge.

d04860000 - AIGX-D-NW25

AIGX-D-NW25

D04860000
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d04861000 - AIGX-D-DN16CF

AIGX-D-DN16CF

D04861000
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d04862000 - AIGX-D-DN40CF

AIGX-D-DN40CF

D04862000
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d0486000c - AIGX-D-NW25, Certificated

AIGX-D-NW25, Certificated

D0486000C
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d0486100c - AIGX-D-DN16CF, Certificated

AIGX-D-DN16CF, Certificated

D0486100C
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d0486200c - AIGX-D-DN40CF, Certificated

AIGX-D-DN40CF, Certificated

D0486200C
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Features and Benefits

  • Full 8-decade measurement capability, to 6.6 x 10-10 mbar (5 x 10-10 Torr).
  • Two versions available, each with three vacuum coupling variants:
    • ‘D’ versions have a 9-pin ‘D’ connector and standard interface;
  • Up to a thirty-fold reduction in charged particle process contamination compared to leading competitors.
  • Automatic filament protection against switching on at atmosphere and running or degassing at high pressure.
  • Gauge sensitivity remains constant over the whole measuring range, thus maintaining output accuracy at higher pressures.
  • Continuous pressure measurement output during degas.
  • Innovative design eliminates the effects of X-ray limits.
  • Bi-color LED gives local indication of gauge status.
  • Wide input voltage range.
  • Electronics very easily removable for bakeout at up to 200 °C.

Technical Data

Pressure range 6.6 x 10-2 to 6.6 x 10-10 mbar

(5 x 10-2 to 5 x 10-10 Torr)
Power supply +14.5 to +30.0 V d.c.
Power consumption Normal operation: 7W (Max),

Degas: 14W (Max)
Output signal Linear, 1 Volt / decade
Response time 1.33 x 10-8 mbar

(>10-8 Torr) ˜ 100 ms

1.33 x 10-8 mbar

(<10-8 Torr) ˜ 1-2 s
Maximum voltage 30 V d.c.
Maximum current 100 mA max
Operating environment Dry non conductive atmosphere
Temperature range
Operating temperature 0 to +40 °C
Storage temperature -30 to +70 °C
 
For more information, contact Edwards. 

Performance

Dimensions

d04850805 - AIGX Fuses Spare Pk5

AIGX Fuses Spare Pk5

D04850805
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d04860800 - AIGX-D Electronics Module SP

AIGX-D Electronics Module SP

D04860800
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c10001630 - DN16CF/1.33 Nut & Bolt & Washer M4 Pk 25

DN16CF/1.33 Nut & Bolt & Washer M4 Pk 25

C10001630
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d40001030 - 3M Active Gauge Cable

3M Active Gauge Cable

D40001030
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d40001050 - 5M Active Gauge Cable

5M Active Gauge Cable

D40001050
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d40001100 - 10M Active Gauge Cable

10M Active Gauge Cable

D40001100
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d40001005 - 0.5M Active Gauge Cable

0.5M Active Gauge Cable

D40001005
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d40001010 - 1M Active Gauge Cable

1M Active Gauge Cable

D40001010
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c10001270 - DN16CF/1.33 Annealed Copper Gasket Pk 5

DN16CF/1.33 Annealed Copper Gasket Pk 5

C10001270
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Active Ion Gauge (AIGX-D) Instruction Manual

Active Ion Gauge (AIGX-D) Instruction Manual

Active Ion Gauge Datasheet

Active Ion Gauge Datasheet