b90003130 - BGV pneumatic gate valve ISO100

BGV pneumatic gate valve ISO100

B90003130

Overview

The BGV basement gate valves are a range of stainless steel, bellows-sealed basement isolation valves. They have been designed, in conjunction with VAT, to enable pumps to be kept running during foreline maintenance in order to maximise the reliability and up-time of pumps operating on harsh processes. The BGV valves are designed for an operating pressure range of 1 x 10-9 mbar to 1.2 bar absolute (1 x 10-7 to 1.2 x 105 Pa). The valves withstand 1.2 bar absolute in either direction and can tolerate against a 1 bar differential pressure across the valve seal.


Although principally designed for isolation of pumps in a semiconductor fab basement, the BGV valves are ideal for other applications where a 1 bar differential at opening is desirable and 20000 cycles is acceptable.

Features and Benefits

  • Jointly developed with VAT, a world leader in sealing technology.
  • Stainless steel construction and robust patented design for a long service life
  • Simple grease-free mechanism minimizes damage due to particulates in dusty processes
  • Can be operated with 1 bar pressure differential so pressure equalization is not required
  • Easy servicing with only inexpensive consumables for low cost of ownership
  • Smooth surfaces for easy cleaning
  • Available with solenoid fitted and wired for easy ordering and installation
  • Plug and play compatible with Edwards semiconductor dry pump when used with optional BGV TIM interface cable.

Technical Data

Leak rate
  Body < 1 x 10-9 mbar ls-1
  Valve seat < 1 x 10-7 mbar ls-1
Pressure range 1 x 10-9 mbar to 1.2 bara
Differential pressure on the gate 1.2 bar in either direction
Differential pressure at opening 1 bar
Cycles until first service 5, 000 
Maximum operating temperatures
  Valve body 120 °C
  Manual actuator 80 °C
  Pneumatic actuator 80 °C
  Position indicator 60 °C
  Solenoid 50 °C
Molecular flow conductance
  NW50 300 ls-1
  ISO63 400 ls-1
  ISO80 1100 ls-1
  ISO100 1700 ls-1
  ISO160 4600 ls-1
Weight
  NW50 3.3 kg (7.3 lbs)
  ISO63 6.6 kg (14.6 lbs)
  ISO80 7.0 kg (15.4 lbs)
  ISO100 8.5 kg (18.7 lbs)
  ISO160 17.7 kg (39.0 lbs)
Materials of construction:
  Body AISI 304 stainless steel
  Bonnet Black anodized aluminum
  Gate AISI 304 stainless steel
  Gliders PEEK
  Bellows AISI 633 stainless steel
  Seals Fluoroelastomer
  Gate fixation screw A2 stainless steel Ni-teflon coated
  Handle Reinforced polyamide
Pneumatic valves
Solenoid rating
  Standard solenoid 24 V - 15% / + 10%, AC/DC, 2.4 W
Position indicator contact rating 12 - 30 V AC/DC, max 500 mA, max 10 W
Pneumatic supply
  Min supply pressure 58 psig (4 bar gauge, 5 bar absolute, 5 x 105 Pa)
  Max supply pressure 100 psig (7 bar gauge, 8 bar absolute, 8 x 105 Pa)
Pneumatic connection R1/8 inch (1/8 inch NPT for valves ordered in USA)

Dimensions



NW50 ISO63 ISO80 ISO100 ISO160
A mm/inch 60/2.36 70/2.75 70/2.75 70/2.75 90/3.54
B mm/inch 36/1.41 43/1.69 43/1.69 43/1.69 52.5/2.06
C mm/inch 63/2.48 69/2.71 69/2.71 69/2.71 87/3.42
D mm/inch 60/2.36 68/2.67 68/2.67 68/2.67 87/3.42
E mm/inch 57/2.24 57/2.24 57/2.24 57/2.24 73/2.87
F mm/inch 13/0.51 15.5/0.61 15.5 /0.61 15.5/0.61 20.3/0.8
G mm/inch 120/4.71 160/6.3 200/7.87 200/7.87 260/10.23
H mm/inch 62.5/2.46 71/2.79 71/2.79 71/2.79 91/3.58
I mm/inch 110/4.32 123/4.84 142/5.58 160/6.3 210/8.26
J mm/inch 134/5.27 149/5.86 165/6.49 185/7.28 264/10.39
K mm/inch 333/13.09 375/14.76 424/16.66 474/18.66 651/25.62
L mm/inch 149/5.86 176/6.92 209/8.21 239/9.4 337/13.27
M mm/inch 45/1.77 53.5/2.1 72/2.83 72/2.83 97/3.83
N mm/inch 90/3.54 105/4.13 124/4.87 142/5.59 192/7.55
NW50 ISO63 ISO80 ISO100 ISO160
A mm/inch 60/2.36 70/2.75 70/2.75 70/2.75 90/3.54
B mm/inch 36/1.41 43/1.69 43/1.69 43/1.69 64/2.52
C mm/inch 63/2.48 69/2.71 69/2.71 69/2.71 87/3.42
D mm/inch 60/2.36 68/2.67 68/2.67 68/2.67 87/3.42
E mm/inch 62.5/2.46 71/2.79 71/2.79 71/2.79 91/3.58
F mm/inch 120/4.71 160/6.3 200/7.87 200/7.87 260/10.23
G mm/inch 77/3.03 82/3.22 82/3.22 82/3.22 92/3.62
H mm/inch 119/4.68 138/5.43 155/6.09 174.5/6.87 241/9.48
I mm/inch 110/4.32 123/4.84 142/5.58 160/6.3 210/8.26
J mm/inch 268/10.53 314/12.36 364/14.31 413.5/16.27 578/22.75
K mm/inch 149/5.86 176/6.92 209/8.21 239/9.4 337/13.27
L mm/inch 45/1.77 68/2.68 72/2.83 83/3.27 113/4.45
M mm/inch 90/3.54 105/4.13 124/4.87 142/5.59 192/7.55