a54781959 - GX1000N Dry Pump 380-460 V 50/60 Hz

GX1000N Dry Pump 380-460 V 50/60 Hz

A54781959

Overview

The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

GX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.

GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Technology

Lower Utilities Costs
Typically a 40% saving can be made on utilities costs over an entire fab.  
  • Based on a 300mm fab in the US, containing 200 tools, 537 pumps
  • 70% GX pumps, 30% iH pumps
  • GX fitted with constant flow water valve
Designed for Energy Efficiency
  • High performance motors and inverter drives
    • Low operating power consumption
    • Lower power standby mode using Active Utility Control (AUC)
  • Nitrogen dilution can be tuned to the application requirement
    • Minimizes gas usage
  • Highly efficient cooling
    • High conductivity materials and good design enables low water flow
  • Precision ceramic bearings
    • Very high load capability for reliability
    • Low noise and vibration
Ethernet Connectivity
The GX Series includes unique web serving functionality that allows viewing of key parameters through a simple Ethernet connection and browser. Any user can simply connect to the pump to view a range of information, such as:  
  • Operating status
  • Key parameters
  • Parameter setpoints
  • Alert summary

Applications

  • Load Lock
  • Transfer
  • Metrology
  • Lithography
  • PVD Process
  • PVD Pre-clean
  • RTA
  • Strip/Ashing
  • Oxide Etch
  • Metal Etch
  • Implant Source

Features and Benefits

  • Reduced Cost of Ownership
    • Up to a 50% reduction in utilities cost compared to iL/iH drypumps
    • No preventative maintenance
  • Flexible Installation Options
    • Small and light for easy installation
    • On-tool, close proximity, or remote
  • Possible Tool Throughput Improvements
    • One of the fastest loadlock pumps available
  • Consistent Pumping Performance Globally
    • Pumping speed identical at 50 and 60 Hz
  • Reduced Ambient Noise
    • Only 55 dB(A)
  • Wide Range of Peak Speed
    • 100, 300, 600 and 800 m3h-1

Technical Data

Performance
Peak speed 800 m3h-1

471 ft3min-1

13333 lmin-1
Ultimate pressure 1 x 10-3 mbar

7.5 x 10-4 Torr

0.10 Pa
Power at 700 Torr exhaust
Ultimate 1.6 kW
AUC (Active Utility Controller) 1.05 kW
Water *
Water inlet 2 slm
Nitrogen 4 or 14 slm **
Installation Details
Footprint (excluding exhaust) 0.20 m2
Weight 230 kg
Inlet connection ISO 100
Outlet connection NW25
Noise at ultimate <55 dB(A)

 
* Requires Constant Flow Valve accessory
** Nitrogen purge can be manually adjusted to a maximum flow of 39slm

Performance

1. m3h-1 2. ft3min-1

Dimensions

GX Next Generation Dry Pump datasheet

GX Next Generation Dry Pumps