The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Lower Utilities Costs
Typically a 40% saving can be made on utilities costs over an entire fab.
Designed for Energy Efficiency
Based on a 300mm fab in the US, containing 200 tools, 537 pumps
70% iGX pumps, 30% iH pumps
iGX fitted with constant flow water valve
High performance motors and inverter drives
Nitrogen dilution can be tuned to the application requirement
Highly efficient cooling
Precision ceramic bearings
The iGX Series includes unique web serving functionality that allows viewing of key parameters through a simple Ethernet connection and browser. Any user can simply connect to the pump to view a range of information, such as:
- Load Lock
- PVD Process
- PVD Pre-Clean
- Oxide Etch
- Silicon Etch
- Metal Etch
- Implant Source