yt850z000 - STP-iXR2206  ISO250F

STP-iXR2206 ISO250F

YT850Z000

Overview

STP-iXR2206 series magnetically levitated turbo-molecular pump provides industry-leading performance and incorporates latest technology small power supply into the on-board control which is the same concept with STP-iXA2206/iXA3306 series. The pumping performance is improved by the newest developed revolutionary rotor design. This fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools.

Applications

  • Glass Coating
  • Solar PVD
  • Industrial Sputtering

Features and Benefits

  • Eliminates connection cable between pump and control unit.
  • Eliminates installation space and cost required by conventional rack type control unit.
  • Compact design results in easy installation and small foot print.
  • Highest pumping speed in the 8” TMP class, along with the STP-A1603.
  • 32% reduced power consumption in the high gas flow area.
  • I/O Remote, RS232C, RS485, STP-Link are standard ports.
  • Profibus and DeviceNet can be selected as options.

Technical Data

Inlet flange VG200/ ISO200F/ ICF253 VG250/ISO250F/ ICF305
Backing port size KF40 KF40
Pumping Speed

N2 1850 ls-1 2200 ls-1
H2 1250 ls-1 1350 ls-1
Ar 1650 ls-1 2000 ls-1
Compression ratio

N2 >108 >108
H2 1 x 103 1 x 103
Ultimate pressure 10-7 Pa (10-9 Torr) 10-7 Pa (10-9 Torr)
Max working pressure
Allowable backing pressure 266 Pa (2 Torr)
Rated speed 36,500 rpm
Run-up time to 90% rated speed
Starting time ≦10 min
Mounting position Any orientation
Cooling method Water cooling
Lubricating oil Not necessary
Backing pump -
Leakage Magnetic Flux
Axial direction -
Radial direction -
Ambient temperature range 0 to 40 °C
Storage temperature range -5 to 55 °C
Input voltage 200 to 240 V a.c.
Maximum input power 750 VA
Weight 48 kg

Performance

Dimensions


Inlet port flange VG200 VG250 ISO200F ISO250F ICF263 ICF305
Ø A 300 350 285 335 253 305
Ø B 269 269 269 269 269 269
C 16 16 16 16 25 28
D 405 375 405 375 420 400
Ø E 270 320 260 310 231.8 284
F 22.5⁰ 15⁰ 15⁰ 15⁰ 7.5⁰ 5.625⁰
G 8- ø 15 12 – ø 15 12 – ø 11 12 – ø 11 24 – ø 8.4 32 – ø 8.4
H 301 271 301 271 316 296
I 249 219 249 219 264 244
J 321 291 321 291 336 321
ptz003114 - Power connector only

Power connector only

PTZ003114
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yt79y0a03 - Power cable 10m

Power cable 10m

YT79Y0A03
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yt79y0a00 - Power cable 5m

Power cable 5m

YT79Y0A00
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yt79u1z00 - iDT-001 Display Terminal

iDT-001 Display Terminal

YT79U1Z00
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STP-iXR2206 Integrated Turbomolecular Pump Datasheet

STP-iXR2206 Integrated Turbomolecular Pump Datasheet