STP-iXA3306C ISO250F

The STP-iXA3306 series magnetically levitated turbomolecular pump provides industry-leading performance and incorporates a small power supply into the onboard control unit – the latest technology of the well-established STPiXA3305 series.
The height of the pump is equal to the STP-XA2703/XA3203 and is also equal to the height of the STP-iXA3305 series without its power supply (iPS-1200). This fully integrated product offers easy installation and a small footprint as an all-in-one solution for all application tools.

• Plasma etch (chlorine, fluorine and bromine chemestries) for metal (aluminium), tungsten and dialectric (oxide) and polysilicon
• Electron cyclotron resonance (ECR) etch
• Film deposition CVD, PECVD, ECRCVD, MOCVD
• Sputtering
• Ion implantation source, beam line pumping and station

• Compact design including a fully integrated controller
• Innovative, self-sensing magnetic bearing system
• Digital 5-axis control
• Vibration levels reduced by 50% compared to the existing turbo pumps
• Can be configured to run corrosive processes

Inlet flange size	ISO250F / VG250 / ICF305	ISO320F / VG300 / ICF356
Backing port size	KF40	K40
Pumping speed N2	2650 ls-1	3200 ls-1
Pumping speed Ar	2300 ls-1	2800 ls-1
Weight	80 kg	83 kg

Compression ratio N2/H2	>108 / 2 x 103
Ultimate pressure	10-7 Pa (10-9 Torr)
Allowable backing pressure	266 Pa (2 Torr)
Max gas flow N2 *(water cooled only)	4000 sccm
	(6.76 Pam3s-1)
Max gas flow Ar * (water cooled only)	2100 sccm
	(3.55 Pam3s-1)
Rated speed	27700 rpm
Starting time	<10 minutes
Mounting position	Any orientation
Input voltage	200-240 V
Max input power without TMS	1500 VA
Max input power with TMS	1800 VA

* The maximum gas flow is applicable under conditions that N₂ or Ar gas is pumped continuously with water cooling temperature under 25º C and the backing pump (10,000 l/min size) is used. It is changed on condition.

Inlet port flange	VG250	ISO250F	VG300	ISO320F	ICF305	ICF356
ØA	350	335	400	425	305	356
­ØB	358	358	358	358	358	358
C	15	15	18	20	28	28.5
D	281	281	242	242	286	281
E	435	435	396	396	440	435
F	363	363	325	325	368	364
G	320	320	282	282	325	321
H	319	319	281	281	324	320
I	251	251	212	212	256	251