yt790z010 - STP-iXR1606 ISO200F

STP-iXR1606 ISO200F

YT790Z010

Overview

STP-iXR1606 series magnetically levitated turbo-molecular pump provides industry-leading performance and incorporates latest technology small power supply into the onboard control which is the same concept with STP-iXA2206/iXA3306 series. The pumping performance is improved by the newest developed revolutionary rotor design. This fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools.

Applications

  • Glass Coating
  • Solar PVD
  • Industrial Sputtering


Features and Benefits

  • Eliminates connection cable between pump and control unit.
  • Eliminates installation space and cost required by conventional rack type control unit.
  • Compact design results in easy installation and small foot print.
  • Highest pumping speed in the 8” TMP class, along with the STP-A1603.
  • 32% reduced power consumption in the high gas flow area.
  • I/O Remote, RS232C, RS485, STP-Link are standard ports
  • Profibus and DeviceNet can be selected as options

Technical Data

Intel Flange  VG150 VG200/VG250

ISO160F ISO200F/ISO250F

ICF203 ICF253/ICF305
Backing port KF40 KF40
Pumping Speed

N2 1000 ls-1 1600 ls-1
H2 800 ls-1 1200 ls-1
Compression ratio
N2 >108
H2 1 x 103
Ultimate pressure 10-7 Pa (10-9 Torr)
Allowable backing pressure 266 Pa (2 Torr)
Max Gas size N2  (water cooled only) 4700  sccm

(7.94 Pam3s-1)
Max Gas size Ar  (water cooled only) 1800 sccm

(3.04 Pam3s-1)
Rated speed 36,500 rpm
Starting time 8 min
Mounting position Any orientation
Input voltage 200 to 240 (± 10) V a.c.
Maximum input power 750 VA
­Weight 48 kg

Performance

Dimensions

Inlet port
flange
VG150 VG200 VG250 ISO160F ISO200F ISO250F ICF203 ICF253 ICF305
ØA 235 300 350 225 285 335 203 253 305
ØB 237 237 237 237 237 237 237 237 237
C 15 16 16 15 16 16 22 25 28
D 420 380 380 420 380 380 420 418 380
ØE 210 270 320 200 260 310 181 231.8 284
F 22.5 22.5 15 22.5 15 15 9 7.5 5.625
G 8-Ø12 8-Ø15 12-Ø15 8-Ø12 12-Ø11 12-Ø11 20-Ø8.4 24-Ø8.4 32-Ø8.4
H 313 273 273 313 273 273 313 311 273
I 263 223 223 263 223 223 263 261 223
ptz003114 - Power connector only

Power connector only

PTZ003114
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yt79y0a03 - Power cable 10m

Power cable 10m

YT79Y0A03
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yt79y0a00 - Power cable 5m

Power cable 5m

YT79Y0A00
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yt79u1z00 - iDT-001 Display Terminal

iDT-001 Display Terminal

YT79U1Z00
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Edwards Maglev Turbos and the Environment Brochure

Edwards Maglev Turbos and the Environment Brochure

STP-iXR1606 Integrated Turbomolecular Pump Datasheet

STP-iXR1606 Integrated Turbomolecular Pump