yt670z040 - STP-XA4503C ISO320F Inlet

STP-XA4503C ISO320F Inlet

YT670Z040

Overview

The STP-XA4503C magnetic bearing turbomolecular pump has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.
 
This pump is based on a new design, offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition. 
 
It has been designed to handle light and harsh duty applications, such as etch, implant, lithography and FPD processes.

Features and Benefits

  • Advanced Rotor Design
    • Increased Argon performance
    • Highest pumping speed in its class
    • Wide process window
    • Higher throughput at lower pressure
    • Maintenance free
    • Harsh process compatible
  • 5-axis Magnetic Suspension System
    • Zero contamination
    • Low vibration
    • High reliability
  • Optimized Temperature Distribution
    • Low deposition
    • Built-in cooling mechanism
    • Higher gas throughput
    • Increased operating life
  • Certifications
    • Conforms to international safety standards
    • UL listed, CE marked and SEMI® S2 compliant

Technical Data

Inlet flange size VF300, ISO320F, VG350
Backing port size KF40
Pumping speed
  N2 3800 to 4300 ls-1

(dependant on model)
  H2 2500 ls-1
Compression ratio
  N2 >108
  H2 6 x 103
Ultimate pressure 10-7 Pa / 10-9 Torr
Max allowable backing pressure 266 Pa / 2 Torr
Max allowable gas flow N2
(Water cooled only)
2800 sccm

4.73 Pam3s-1
Maximum allowable gas flow Ar
(Water cooled only)
2150 sccm

3.63 Pam3s-1
Rated speed 24000 rpm
Run up time to 90% rated speed 12 minutes
Mounting position Any orientation
Water cooling
  Flow 3 lmin-1
  Temperature 5 – 25 °C / 41 – 77 °F
  Pressure 0.3 MPa
Recommended purge gas flow N2 50 sccm / 8.4 x 10-2 Pam3s-1
Input voltage 200 – 240 ±10 % V a.c.
Maximum input power (without TMS) 1.5 KVA

Performance

Dimensions1

A. TMS Sensor E. Cooling water port 2-RC ¼ (ISO)
B. Tms Heater (built in) F. Purge port KF10
C. Heater cover G. Inlet port VG350
D. Outlet port KF40 H. TMS – Temperature management system
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STP-XA4503C Turbomolecular Pump Datasheet

STP-XA4503C Turbomolecular Pump Datasheet

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