yt21z0z01 - SCU-350 Control Unit

SCU-350 Control Unit

YT21Z0Z01

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Overview

The Edwards new SCU-350 control unit is a EU-RoHS compliant controller for small sized turbo pumps. It is fully compatible with the current control unit models, but has an improved vibration property at low frequency range.  It also has lower input voltage, which contributes to a reduction in electric capacity and tool power consumption.
The SCU-350 has improved noise immunity and is equipped with universal voltage function for operation with supply voltage from 100-240 VAC without switching.

Applications

  • STP301/451 series
  • STPL301/L451 series
yt21z0z01 - SCU-350 Control Unit

SCU-350 Control Unit

YT21Z0Z01
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yt21zez20 - SCU-350 Turbo Pump Control Unit with RS232

SCU-350 Turbo Pump Control Unit with RS232

YT21ZEZ20
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yt21zczc0 - SCU-350A Turbo Pump Control Unit with ABS

SCU-350A Turbo Pump Control Unit with ABS

YT21ZCZC0
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Features and Benefits

  • Better vibration property
  • No peak vibration movement across all frequencies
  • Compact design
  • Smallest size control unit in its class
  • Energy saving
  • Low input power translates into low power consumption on the tool
      Universal voltage for range 100-240VAC.
      No switching required between 100-120V and 200-240V. 
      Minimizes number of back up units stocked
  • Full compatibility with existing control unit
  • Same size
      Same cables can be used
      No change to pumping performance
  • Better noise immunity
  • Electrostatic discharge withstand voltage up to 30kV with standard specification
      Applicable for ion implant tools
  • Compliant with international standards
  • CE Marked, UL marked, SEMI-S2 and EU-RoHS Compliant

Technical Data

Magnetic bearing control system Digital control
Input voltage 100-120

200-240V a.c.
Power consumption (Start up) Max 350 VA
Power consumption (continuous) Max 150 VA
Input frequency 50/60 ±2 Hz
Leak current 3.5 mA
Main breaker rated current 5 A
Motor drive system 3-phase DC
Allowable ambient temperature 0 to 40 °C

(32 to 104 °F)
Weight 8 kg
Panel display LCD

Dimensions

Pump to controller cable
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