Overview
The Spectra-G is a cost-effective, high performance exhaust treatment solution for nitride MOCVD manufacturing.
Technology
4 Stage Combustion The unique 4-stage combustion system of the Spectra-G ensures that oxidation of silane occurs in the middle of the combustion zone, away from the inlets, hence preventing the deposition of oxide powders on the combustor nozzles and maximizing uptime.
Effective Powder Handling System The oxide powders generated by the combustion of metalorganics are entrapped in the cooling air stream that is introduced in the Spectra-G at a velocity of 10 m/sec.
Air flow is generated by the house extraction system. This air-cooled design ensures that combustion by-products are efficiently transported from the Spectra-G to the factory central scrubber or dust filter.
Optimum Combustion Nitride MOCVD processes involve the use of high H
2 and NH
3 flows. The Spectra-G utilizes the inherent flammability of these gases to minimize the additional fuel required to complete the gas abatement reactions (oxidation). Different fuel types are available to suit customer requirements.
The high gas capacity of the Spectra-G allows up to six production MOCVD tools to be connected. Each individual inlet allows each exhaust to act independently, thereby reducing capital and running costs.
| Gas | Input (slm) | Exhaust |
| H2 | 320 | < 0.2% |
| NH3 | 160 | 3 ppm |
| NO | | < 25 ppm |
| NO2 | | 2 ppm |
User Friendly System
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Ease of use - The Spectra-G is configured, monitored and controlled via a large touch-screen display. Four gauges display the fuel gas and extraction pressures.
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Component Accessibility - Designed for fast maintenance - all electrical components are accessible from the front of the Spectra-G and all mechanical components are easily accessible from the left side of the system.
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Easy communication - The PLC and built-in computer of the Spectra-G allow easy communication with the vacuum pumps, the process tool and the factory monitoring system.
Applications
The Spectra-G can incorporate up to six independent inlet ports. The independent inlet ports ensure that premixing of incompatible gases does not take place upstream of the burner. This means that simultaneous input of incompatible gases can be treated by a single Spectra-G through different inlets.