The fully-digital SCU-XL800 turbo pump control unit is compatible with STP turbo pumps ranging from 600 l/s to 1300 l/s.
The SCU-XL800 reduces the vibration levels of less than 300 Hz which are difficult to eliminate with mechanical vibration isolators.
It achieves sub-nanometer vibration levels across the frequency spectrum using advanced Digital Signal Processor (DSP) techniques. The controller is suitable for use with electron microscopy, metrology and lithography systems where low-vibration is critical to the application.
For more information, please contact Edwards.