scu-xl800 turbomolecular pump control unit - SCU-XL800 Turbomolecular Pump Control Unit

SCU-XL800 Turbomolecular Pump Control Unit

SCU-XL800 TURBOMOLECULAR PUMP CONTROL UNIT

Overview

The fully-digital SCU-XL800 turbo pump control unit is compatible with STP turbo pumps ranging from 600 l/s to 1300 l/s.
 
The SCU-XL800 reduces the vibration levels of less than 300 Hz which are difficult to eliminate with mechanical vibration isolators.
 
It achieves sub-nanometer vibration levels across the frequency spectrum using advanced Digital Signal Processor (DSP) techniques. The controller is suitable for use with electron microscopy, metrology and lithography systems where low-vibration is critical to the application.
 
For more information, please contact Edwards.
scu-xl800 turbomolecular pump control unit - SCU-XL800 Turbomolecular Pump Control Unit

SCU-XL800 Turbomolecular Pump Control Unit

SCU-XL800 TURBOMOLECULAR PUMP CONTROL UNIT

Features and Benefits

  • Enhances Performance of the STP Pump Range
    • New magnetic bearing system achieves vibration levels of sub-nanometer order across the frequency spectrum
    • Reduces the amplitude of low frequency vibrations which are difficult to suppress with mechanical vibration isolators
    • Automatic Balancing System (ABS)
    • Auto Vibration Reduction (AVR)
  • Compatible Models
    • STP-603/1003, STP-A803/A1303C
    • Automatic recognition of the applicable pumps
  • Advanced Pre-maintenance Function
    • Precise maintenance timing
    • Two-stage warning messages
    • Rotor imbalance monitoring
    • Back-up bearing damage monitoring
    • Self-diagnostic functions
  • Certifications
    • SEMI® compliant, CE marked, UL listed

Technical Data

Input voltage 100-120V±10%*, VAC
200-240V ±10% VAC
Input power Max 850 VA
Input frequency 50/60 ±2 Hz
Input phase Single Phase
Main circuit breaker 15 A
Output voltage at normal speed Max 80 VAC
Output frequency at normal speed Max 800 Hz
Allowable environment temperature °C (°F)
Storage temperature °C (°F)
Weight Kg (lb)
Time display function Inside
Communication interface RS232C/RS485/
I/O Remote
Monitoring function Optional Accessory:
STP-Link Monitoring Software
* STP-603/1003 series only

Dimensions

Edwards Maglev Turbos and the Environment Brochure

Edwards Maglev Turbos and the Environment Brochure