b71901001 - STPH451C ISO160K Inlet

STPH451C ISO160K Inlet

B71901001

Overview

Edwards high performance STPH451C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH451C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Technology

Edwards is a leader in clean and dry vacuum technology. The first STP pumps were sold in 1983 and there are now over 120,000 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pump­ing, minimal maintenance and low vibration.
 
  • Proven reliability.
  • Clean oil-free high vacuum.
  • Complete range from 300 to 4500 l s-1.
  • Application specific models.
  • Very low noise and vibration.
  • Low cost of ownership.
  • Virtually maintenance free.
  • Installation in any orientation.
  • Full remote control interface.
  • Supported globally by Edwards
Proven magnetic bearing technology
 
The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. 
  
High throughput series
 
The high throughput series of magnet­ically levitated turbo pumps generate the high gas flows required by the current generation of semiconductor etch, ion implant and LCD systems. All the pumps feature a five active axis magnetic bearing system and a d.c. drive for increased robustness and stability. They use a Holweck stage to provide advanced throughput performance. They operate via a half rack controller with auto-tuning, advanced diagnostics and an inte­grated temperature management system. The range operates with throughput speeds from 300 l s-1 to 450 l s-1
 
Oil Free
 
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in the semiconductor industry (where device densities are constantly increasing) and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
 
Maintenance free
 
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
 
Vibration free
 
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peak-to-peak vibration level is less than 0.02 µm. This amplitude remains constant throughout the life of the pump and is free from troublesome sub-harmonics
 
Automatic balancing system (ABS)
 
ABS is a unique patented devel­opment of 5-axis technology. If any rotor imbalance is introduced (by dep­osition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimizes the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
 
Safety backup bearings
 
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic sus­pension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation.
 
Optimized rotors
 
The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beam­lines on CD SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios.
 
Compound rotors
 
The high throughput pumps incorporate a Holweck drag stage that increases the pumps throughput at low pressure. 
 
Corrosion resistant
 
To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput (H-C) pumps have nickel coated rotors/stators and pump inter­nals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request.
 
Nitrogen purging
 
The corrosion resistant (C) pumps and the high throughput (H-C) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils.
 
TMS system
 
The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramat­ically reducing the particle condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but also increase its operational life.

Applications

  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons

Features and Benefits

Advanced rotor technology  
  • Higher gas throughput
  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible
  • Increased life
Advanced controller design  
  • Auto tuning
  • Self diagnostic functions
  • d.c. motor drive
  • Battery-free operation
Compact design  
  • Small footprint
  • Half rack controller
5 axis magnetic suspension system  
  • Zero contamination
  • Low maintenance
  • Any orientation operation

Technical Data

Inlet flange ISO160K
Outlet port KF40
Purge port KF10
Water cooling fitting PT1/4
Pumping Speed
  N2 450 ls-1
  H2 300 ls-1
Compression ratio
  N2 >108
  H2 103
Ultimate pressure with bake out heating 10-7 Pa

(10-9 Torr)
Max continuous outlet pressure 665 Pa

(5 Torr)
Max Nitrogen throughput 2500 sccm
Rated speed 48000 rpm
Starting time 4 min
Max inlet flange temperature 120 °C
Input voltage 100 to 120 (± 10) V a.c. or

200 to 240 (± 10) V a.c.
Power consumption 0.6 kVA
Pump weight 15 kg
Controller weight 9 kg

Performance

1. 450 ls-1  N2 2. 340 ls-1  He 3. 300 ls-1  H2

Dimensions


A Electrical connector B Outlet port C Purge port
D Cooling water out E Cooling water in  
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STPH451C High Performance Turbomolecular Pump Datasheet

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