a54113010 - iXL120 E 200-460V 3/8 QC Water Fittings

iXL120 E 200-460V 3/8 QC Water Fittings

A54113010

Overview

iXL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption.

iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!
a54113020 - iXL120 E 200-460V 1/4 QC Water Fittings

iXL120 E 200-460V 1/4 QC Water Fittings

A54113020
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a54113610 - iXL120 E 200-460V HIT 3/8 QC Water Fittings

iXL120 E 200-460V HIT 3/8 QC Water Fittings

A54113610
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a54113710 - iXL120 E 200-460V MCM 3/8 QC Water Fittings

iXL120 E 200-460V MCM 3/8 QC Water Fittings

A54113710
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a54113011 - iXL120 E 200-460V 3/8 QC Water Fittings Flow Cont Valve

iXL120 E 200-460V 3/8 QC Water Fittings Flow Cont Valve

A54113011
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a54113221 - iXL120 E 200-460V SPI 1/4 QC Water Fittings Flow Cont Valve

iXL120 E 200-460V SPI 1/4 QC Water Fittings Flow Cont Valve

A54113221
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a54113611 - iXL120 E 200-460V HIT 3/8 QC Water Fittings Flow Cont Valve

iXL120 E 200-460V HIT 3/8 QC Water Fittings Flow Cont Valve

A54113611
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a54113711 - iXL120 E 200-460V MCM 3/8 QC Water Fittings Flow Cont Valve

iXL120 E 200-460V MCM 3/8 QC Water Fittings Flow Cont Valve

A54113711
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Features and Benefits

  • Class leading chamber pump down time reduces Total Average Cycle Time (TACT)
  • Only 0.55kW power consumption helps minimise customer cost of ownership
  • Green Mode can reduce power consumption by up to 92% during idle periods
  • Up to 35oC water supply helps reduce facility cooling water requirements
  • Extremely small and light, helping to save valuable fab space
  • Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance
  • Unique dual inlet arrangement allows efficient foreline routing and location options
  • Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs

Technical Data

Product iXL120
Peak speed 110 m3h-1

65 cfm

1833 lmin-1
Ultimate pressure (typical) 0.013 mbar

0.009 Torr

1.3 Pa
Power at ultimate 0.55 kW
Power in Green Mode 0.045 kW
Inlet connection
Vertical ISO63
Horizontal NW50
Outlet connection NW25
Cooling water connection Optional
Water flow 1 lmin-1
Weight 59 kg

Performance

Dimensions